Micromachines with Nanomechanical MEMS Flexures & Membranes - Archived

Microelectromechanical systems (MEMS) are used in consumer gadgets and automotive electronics as well as in biomedical, space, industrial, medical, and defense applications. Currently, silicon and its derived materials are the primary materials used in microelectronics and microsystems. Despite the increasing demands for MEMS-based devices such as sensors and actuators in diverse applications, the design and fabrication of microsystems are not fully standardized, unlike conventional semiconductor technologies like complementary metal–oxide–semiconductors (CMOS)/very large scale integration (VLSI). Over the last decade, many classes of microsystems have been developed using alternative materials like polymers and ceramics. This results in a reduction in the cost of fabrication and an improvement in sensor performance and the integration of novel transduction schemes such as field-effect transistor (FET)-integrated MEMS.

In this webinar, Dr. Seena V will provide an overview of her research at the Indian Institute of Space Science and Technology (IIST) on the development of different micromachines, such as nanomechanical MEMS gas sensors, temperature sensors, and FET-integrated MEMS accelerometers, using silicon and polymer MEMS technologies. She will discuss the role of COMSOL Multiphysics^® and simulation in this research as well as the scope of CMOS-MEMS integration.