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Please I need help simulating a suspended microheater

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Please I need help simulating a suspended microheater, heater - Platinum, Membrane - Silicon Oxide and Silicon Nitride, suspended over Silicon. I have tried the Joule Heating and Thermal expansion Physics, and it came out with a very bad result (Simulating for Temperature, Power consumption and Stress). I'm a new user and i've tried and failed! watched couple of videos but still can't pull through. Please a detailed step by step guide will be appreciated even if it's a link. thanks in anticipation.


0 Replies Last Post Jul 24, 2019, 8:47 a.m. EDT
COMSOL Moderator

Hello George A

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