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Capacitive Presure Sensor

Posted Mar 18, 2012, 11:17 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2 0 Replies

Sanjay Mukuntha Madhava
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I have to design a Parallel plate Capacitive Pressure Sensor. The plates are Circular and are both fixed. When pressure is applied, the plate deforms and the capacitance changes.
Can someone please tell me how to couple Electro statics and Structural Mechanics?

Thanks in advance
Sanjay
0 Replies Last Post Mar 18, 2012, 11:17 a.m. EDT
COMSOL Moderator

Hello Sanjay Mukuntha Madhava

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