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Eigenfrequency on Thermo-Solid Coupling

Posted Nov 8, 2021, 9:06 p.m. EST Structural Mechanics Version 5.6 0 Replies

zhaoxiang du
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Dear Comsol Community,

I am simulating the eigenfrequency of a MEMS device. In the case of only solid mechanical field, I can find the eigenfrequency well(13384Hz,13749Hz,17516Hz,...).When I coupled heat transfer field and mechanical field, no heat source was added(The initial temperature values of all domains remain the same).Theoretically, the eigenfrequency should not change because there is no thermal stress and thermal expansion(Material parameters are constants).The eigenfrequency obtained by coupling is (-1.0069e-15i, 0.012144i, 0.014457i,...). The mode shape after coupling is also very strange.

I am confused about the simulation results have a large mismatch with the theory results.

Thanks.

Kind Regards.

-Zhaoxiang

0 Replies Last Post Nov 8, 2021, 9:06 p.m. EST
COMSOL Moderator

Hello zhaoxiang du

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