Minimum object size for microwave heating interface.

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Hello. I'm modeling microwave heating chamber and load with microwave heating interface. My question is, is it impossible to simulate object with nanometer thickness?

My object is consists of 3 layers. (You can see below) Each layers are 100nm, 10nm, 50nm.

When I try to select each layers in Component>Definition>lists>explicit, I can't select none of these objects.

If I scale up these objects to um scale, it works. What is the problem here?

I would appreciate any advice.



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