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Transport of dilute species module
Posted Feb 7, 2015, 1:15 a.m. EST 1 Reply
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Respected Sir,
I am working on chemical vapor deposition. I have a chamber in which there have to occur 5 bulk reactions and 5 surface reactions.I have all the data for the rate expressions(Reversible reactions in the bulk and irreversible reactions on the surface).Plz guide me as how can i write these 5 reactionsi n the bulk and 5 reactions on the surface of the chamber under consideration.
I will be extremely indebted to you if u let me know how to proceed ahead
Yours Sincerly
Jayarama krishna
NIT Warangal
I am working on chemical vapor deposition. I have a chamber in which there have to occur 5 bulk reactions and 5 surface reactions.I have all the data for the rate expressions(Reversible reactions in the bulk and irreversible reactions on the surface).Plz guide me as how can i write these 5 reactionsi n the bulk and 5 reactions on the surface of the chamber under consideration.
I will be extremely indebted to you if u let me know how to proceed ahead
Yours Sincerly
Jayarama krishna
NIT Warangal
1 Reply Last Post Feb 7, 2015, 2:42 a.m. EST
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Posted:
10 years ago
Hi
Bulk reactions are expressed in the diffusion equation as reaction terms R, and surface reactions as the flux boundary condition. Your question is so broad that I cannot say more, but in the model library there is a GaAs cvd model, although it is rather advanced.
best
Lasse
Bulk reactions are expressed in the diffusion equation as reaction terms R, and surface reactions as the flux boundary condition. Your question is so broad that I cannot say more, but in the model library there is a GaAs cvd model, although it is rather advanced.
best
Lasse