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Multilayered membrane Resonance frequency

Posted May 6, 2015, 9:07 p.m. EDT 0 Replies

Sankha Mukherjee
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Hello Users,

I was wondering if it was possible to calculate resonance frequency of a multilayered membrane using COMSOL? I have a square membrane (500 micron each side) of SiN of thickness 0.5 micron, coated with aluminium of the same thickness. The membrabe is clamped at all the edges. I would like to know the modeshapes and related resonance frequencies. Please answer.

Thanks

Sankha
0 Replies Last Post May 6, 2015, 9:07 p.m. EDT
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Hello Sankha Mukherjee

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