Technical Papers and Presentations

One challenge in designing micro-electromechanical systems (MEMS) is considering the variability of design parameters caused by manufacturing tolerances and material properties. The function of MEMSs is significantly influenced by this variability, which can be represented in terms of statistical variables. In order to involve statistical design parameters into the design optimization process, we use probabilistic approaches. Monte Carlo Sampling, Response Surface, and Moment methods will be described.  We applied the methods to a thin-film resonator as an example to show how to analyze the influence of scattering design parameters on the behavior of the resonator. We used a COMSOL Multiphysics model, which computes the first resonance frequency. For performing the probabilistic simulation, the model is coupled to OptiY via an appropriate interface.