Introduction to the Plasma Module
Duration: 54:59
Get an introduction to the Plasma Module as of COMSOL Multiphysics® version 5.6 in this archived presentation and model demo, where we focus on modeling low-temperature and nonequilibrium plasma reactors.
Watch now to learn about:
- Plasma Module validity and capabilities
- Plasma model theory
- Plasma chemistry
- How to build an ICP reactor model
- Modeling a CCP reactor where the ion energy distribution function (IEDF) is computed
Tip: The Application Gallery contains many tutorial models made with the Plasma Module, which are available for instant download.
Chapter Selection
Introduction (0:00)
Outline (0:25)
Nonequilibrium Discharges (0:59)
Application-Specific Interfaces (2:15)
Plasma Module Validity and Capabilities (3:28)
Types of Plasma (5:14)
Plasma Interface Equations (6:13)
Electromagnetic Fields (7:42)
Gas Flow Transport and Heat Transport (8:30)
Plasma Global Model (9:08)
Capacitively Coupled Plasmas and the Plasma Time, Periodic Interface (10:40)
Plasma Chemistry (12:51)
Model Demo (14:24)