Keynote: Modeling of Transformer-Coupled Toroidal Plasma

Plasma has properties that make it uniquely suitable for semiconductor fabrication. As such, various forms of low-temperature plasma have become widely used in semiconductor manufacturing processes.

In this keynote talk from COMSOL Day: Semiconductor Manufacturing, Ilya Pokidov gives a high-level overview of the use of low-temperature plasma in material processing and compares in situ with remote plasma. Pokidov also discusses the results of modeling transformer-coupled toroidal plasma with the COMSOL Multiphysics^® software and focuses on ways to modify the results to get closer agreement with theory and published data.

Ilya Pokidov is a senior principal mechanical engineer in the Plasma and Reactive Gas Solutions division of MKS Instruments. Pokidov holds an MS degree in mechanical engineering from Northeastern University.