Keynote: Simulation of Vacuum Sensors

Semiconductor chip manufacturing and quantum computing depend on high-vacuum (HV) environments for advanced production processes. In this keynote talk from the COMSOL Conference 2023 Munich, Dr. Martin Wüest of INFICON discusses how he and his team used multiphysics modeling to help develop the IRG080, a better ionization gauge for measuring pressure in HV environments.

Before highlighting the novel IRG080 technology, Wüest gives an introduction to INFICON and the widespread applications of vacuum technology. Then, he gives a brief overview of the simulations that he and his team conduct, including mechanical simulations of vacuum pressure sensors and thermal simulations of printed circuit boards. The latter half of the talk focuses on INFICON's development and design of the IRG080, the first vacuum gauge suitable as a reference standard for the calibration of vacuum gauges and mass spectrometers.

Martin Wüest received his PhD in physics from the University of Bern, Switzerland. He is currently the head of sensor technology in the Vacuum Control business unit of INFICON Ltd., Liechtenstein.

Suggested Resource

Read about INFICON's work in this article: Elevating the Performance of Ionization Gauges with Simulation