MEMS Gyroscope Heater

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Hello,

I was wondering if it is possible to combine a microheater simulation with a mems gyroscope simulation. I have two separate MPH files with different simulations. Would I just recreate the heater geometry in my MEMS gyro simulation and create two boundaries? How can I use the subsequent resultant heat from the heater to be applied to the MEMS gyro? Would it make more sense to take that resultant heat value and apply a thermal boundary on the MEMS itself?


0 Replies Last Post Aug 25, 2024, 6:46 p.m. EDT
COMSOL Moderator

Hello theo_v

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