Menu

Discussion Forum

New Discussion
Filter

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

Do the modules in comsol consider the space charge effect when simulating the tracks of charged particle beam?

Posted Apr 13, 2015, 10:10 a.m. EDT Low-Frequency Electromagnetics 0 Replies

Gaoteng Wang
Send Private Message Flag post as spam

Please login with a confirmed email address before reporting spam

Hi, i'm a beginner in comsol, it is my first time when i went to a lecture which introducing comsol that i realized comsol is a so powerful tool for engineering.

Then i exploring the website and find that the particle tracking module maybe useful for me. But i'm not sure that when calculating the tracks of charged particle beam, does the space charge effect considered by the module?

It is well known that the space charge effect is very important especially when the energy of charged particle beam is low.

And the industrial application of the low energy charged particle beam is ion implantation which is one of the core technologies for modern IC manufacturation
0 Replies Last Post Apr 13, 2015, 10:10 a.m. EDT
COMSOL Moderator

Hello Gaoteng Wang

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.

Suggested Content