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Specification Chart

Plasma

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COMSOL Multiphysics®
AC/DC Module
MEMS Module
Plasma Module
RF Module
Select any check box to highlight individual products:
Physics Interfaces and Study Types
ExpandBoltzmann Equation, Two-term Approximation
ExpandCharge Transport
ExpandDrift Diffusion
ExpandElectrical Breakdown Detection
ExpandHeavy Species Transport
ExpandPlasma
ExpandPlasma, Time Periodic
Boundary Conditions
Electrons
Flux
Insulation
Prescribed Electron Density
Prescribed Mean Electron Energy
ExpandWall
Heavy Species
Bulk Species
Flux
Inlet
Outlet
Surface Reactions
Surface Species
Symmetry
Data Import
Cross Section Data
Discretization
Finite Element
Finite Volume
Material Library
Equilibrium Discharge
Predefined Multiphysics Interfaces
ExpandCorona Discharge
ExpandInductively Coupled Plasma1
ExpandMicrowave Plasma1
Equilibrium Discharges
ExpandCombined Inductive/DC Discharge1
ExpandEquilibrium DC Discharge
ExpandEquilibrium Inductively Coupled Plasma1
Results and Visualization
ExpandSmith (plot)
Volumetric Domain Properties
1D, 2D, Axisymmetric, and 3D Formulations
Automatic Computation of Electron Mobility
Collisionless Heating
Drift Diffusion Model
Electron Production Rate
General Power Deposition
Inductive Power Deposition
Microwave Power Deposition
Reaction
Species, Non-Electron
Thermal Diffusion of Electrons
Diffusion-Models for Heavy Species Transport
Fick's Law
Global Modeling
Mixture-Averaged
Electron Energy Distribution Function
Boltzmann equation, two-term approximation
Druyvesteyn
Generalized
Maxwellian
User Defined
Electron Energy Models
Energy Equation
Fixed Mean Electron Energy
Local Field Approximation
Electron Impact Reaction
Specify with Arrhenius Coefficients
Specify with Cross-section Data
Specify with Look-up Tables
Specify with Rate Constant
Specify with Townsend Coefficients
Ion Mobility Models
Automatic from Diffusivity
Dalgarno
High Field Limit
Lookup Table
User Defined
  1. Requires all indicated products