A Micromachined Comb-Drive Tuning Fork Rate Gyroscope

Application ID: 88781


This tutorial example of a comb drive tuning fork gyroscope is kindly provided by Dr. James Ransley at Veryst Engineering, LLC. The model demonstrates fully parameterized geometry, extensive use of selection features, implementation of analytic formulas for the electromechanical forces and response estimation, and comparison of numerical results with analytical estimations. In particular, extrusion operators are used to compute the distances between electrodes for force calculation.

This model example illustrates applications of this type that would nominally be built using the following products: